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한정우
2025-02-03 11:02:48 +09:00
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<!DOCTYPE html>
<html lang="en">
<head>
<meta charset="UTF-8">
<meta http-equiv="X-UA-Compatible" content="IE=edge">
<meta name="viewport" content="width=device-width, initial-scale=1.0">
<link href="vendor/fontawesome-free/css/all.min.css" rel="stylesheet" type="text/css">
<link href="../../../../../css/sb-admin-2.min.css" rel="stylesheet">
<link href="../../../../../css/sb-custom-1.css" rel="stylesheet">
<script type="text/javascript" src="../../../../../js/sb-custom-1.js"></script>
<title>TroubleShooting: CPP_DSMR_BYND_T2_EES</title>
</head>
<body>
<div class="div-Title01">TroubleShooting: CPP_DSMR_BYND_T2_EES</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01">Information</div>
<div class="div-content01">
CPP_DSMR_BYND_T2_EES - 디스미어, 화학동
<ul>
<li><a class="href-collapse" href="#lotreserverequest">작업예약</a> - LotReserveRequest</li>
<li><a class="href-collapse" href="#lottrackinrequest">작업시작</a> - LotTrackInRequest</li>
<li><a class="href-collapse" href="#lottrackoutrequest">작업완료</a> - LotTrackOutRequest</li>
<li><a class="href-collapse" href="#issue01">ISSUE #1</a> - Equipment State Change Message</li>
</ul>
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lotreserverequest">작업예약</a></div>
<div class="div-padding01" id="lotreserverequest">
<ul>
<li>
작업예약 - LotReserveRequest
<ol>
<li class="check-start">[EQP] S6F11 CEID: 601 Lot Request</li>
<li>[MES] EqpLossCheckRequest</li>
<li>[MES] EqpLossCheckRequestReply</li>
<li>[MES] LotEqpChangeCheckRequest</li>
<li>[MES] LotEqpChangeCheckRequestReply</li>
<li>[MES] AdditionItemCheckRequest</li>
<li>[MES] AdditionItemCheckRequestReply</li>
<li>[MES] LotReserveRequest</li>
<li class="check-start">[MES] LotReserveRequestReply</li>
<li>[MES] CommonPkgConditionV1Request</li>
<li>[MES] CommonPkgConditionV1RequestReply</li>
<li>[MES] SpecInfoRequest</li>
<li>[MES] SpecInfoRequestReply</li>
<li>[MES] CurrentRecipeIDRequest</li>
<li>[MES] CurrentRecipeIDRequestReply</li>
<li>[EQP] S7F19</li>
<li>[EQP] S7F20</li>
<li>[EQP] S7F25</li>
<li class="check-start">[EQP] S7F26</li>
<li>[MES] RecipeValidationRequest</li>
<li>[MES] RecipeValidationRequestReply</li>
<li>[EQP] S2F41 RCMD: PP_SELECT</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 314 PPSelected</li>
<li class="check-start">[EQP] S6F11 CEID: 310 Lot Start Request</li>
<li>[EQP] S2F41 RCMD: LOT_START</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 603 Lot Started</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_CppDsmrBynd-01.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackinrequest">작업시작</a></div>
<div class="div-padding01" id="lottrackinrequest">
<ul>
<li>
작업시작 - LotTrackInRequest
<ol>
<li class="check-start">[EQP] CEID: 301 Lot Loading</li>
<li>[MES] LotTrackInRequest</li>
<li>[FDC] LotProcessStartReport</li>
<li>[MES] LotTrackInRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_CppDsmrBynd-02.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackoutrequest">작업완료</a></div>
<div class="div-padding01" id="lottrackoutrequest">
<ul>
<li>
작업완료 - LotTrackOutRequest
<ol>
<li class="check-start">[EQP] S6F11 - CEID: 302 Lot Complete</li>
<li>[MES] LotTrackOutRequest</li>
<li>[FDC] LotProcessEndReport</li>
<li>[MES] LotTrackOutRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotProcessEndReport</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_CppDsmrBynd-03.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="issue01">ISSUE #1</a> - Equipment State Change Message</div>
<div class="div-padding01" id="issue01">
설비 상태 변경이 없는데 이벤트가 발생<br />
S5F3 (Enable/Disable Alarm) - 불필요한 메시지 전송이 발생<br />
<img src="Image/TS_B1_CppDsmrBynd-ISSUE01.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<script>
const items = document.querySelectorAll('.div-header01');
items.forEach(item => item.addEventListener('click', ToggleNextElement_Div));
const items0 = document.querySelectorAll('.href-collapse');
items0.forEach(item => Close_IDofHref(item));
items0.forEach(item => item.addEventListener('click', Open_IDofHref));
</script>
</body>
</html>

120
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<!DOCTYPE html>
<html lang="en">
<head>
<meta charset="UTF-8">
<meta http-equiv="X-UA-Compatible" content="IE=edge">
<meta name="viewport" content="width=device-width, initial-scale=1.0">
<link href="vendor/fontawesome-free/css/all.min.css" rel="stylesheet" type="text/css">
<link href="../../../../../css/sb-admin-2.min.css" rel="stylesheet">
<link href="../../../../../css/sb-custom-1.css" rel="stylesheet">
<script type="text/javascript" src="../../../../../js/sb-custom-1.js"></script>
<title>TroubleShooting: CPP_ELEP_TKC_T2_EES</title>
</head>
<body>
<div class="div-Title01">TroubleShooting: CPP_ELEP_TKC_T2_EES</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01">Information</div>
<div class="div-content01">
CPP_ELEP_TKC_T2_EES - 전기동
<ul>
<li><a class="href-collapse" href="#lotreserverequest">작업예약</a> - LotReserveRequest</li>
<li><a class="href-collapse" href="#lottrackinrequest">작업시작</a> - LotTrackInRequest</li>
<li><a class="href-collapse" href="#lottrackoutrequest">작업완료</a> - LotTrackOutRequest</li>
</ul>
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lotreserverequest">작업예약</a></div>
<div class="div-padding01" id="lotreserverequest">
<ul>
<li>
작업예약 - LotReserveRequest
<ol>
<li class="check-start">[EQP] S6F11 CEID: 601 Lot Request</li>
<li>[MES] EqpLossCheckRequest</li>
<li>[MES] EqpLossCheckRequestReply</li>
<li>[MES] LotEqpChangeCheckRequest</li>
<li>[MES] LotEqpChangeCheckRequestReply</li>
<li>[MES] AdditionItemCheckRequest</li>
<li>[MES] AdditionItemCheckRequestReply</li>
<li>[MES] LotReserveRequest</li>
<li class="check-start">[MES] LotReserveRequestReply</li>
<li>[MES] CommonPkgConditionV1Request</li>
<li>[MES] CommonPkgConditionV1RequestReply</li>
<li>[EQP] S2F41 RCMD: PP_CONDITION</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li class="check-start">[EQP] S6F11 CEID: 332 PopConditionComplete</li>
<li>[MES] CurrentRecipeIDRequest</li>
<li>[MES] CurrentRecipeIDRequestReply</li>
<li>[EQP] S7F19</li>
<li>[EQP] S7F20</li>
<li>[EQP] S7F25</li>
<li class="check-start">[EQP] S7F26</li>
<li>[MES] RecipeValidationRequest</li>
<li>[MES] RecipeValidationRequestReply</li>
<li>[EQP] S2F41 RCMD: PP_SELECT</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 314 PPSelected</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_CppElepTkc-01.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackinrequest">작업시작</a></div>
<div class="div-padding01" id="lottrackinrequest">
<ul>
<li>
작업시작 - LotTrackInRequest
<ol>
<li class="check-start">[EQP] CEID: 301 Lot Loading</li>
<li>[MES] LotTrackInRequest</li>
<li>[FDC] LotProcessStartReport</li>
<li>[MES] LotTrackInRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_CppElepTkc-02.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackoutrequest">작업완료</a></div>
<div class="div-padding01" id="lottrackoutrequest">
<ul>
<li>
작업완료 - LotTrackOutRequest
<ol>
<li class="check-start">[EQP] S6F11 - CEID: 302 Lot Complete</li>
<li>[MES] LotTrackOutRequest</li>
<li>[FDC] LotProcessEndReport</li>
<li>[MES] LotTrackOutRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotProcessEndReport</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_CppElepTkc-03.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<script>
const items = document.querySelectorAll('.div-header01');
items.forEach(item => item.addEventListener('click', ToggleNextElement_Div));
const items0 = document.querySelectorAll('.href-collapse');
items0.forEach(item => Close_IDofHref(item));
items0.forEach(item => item.addEventListener('click', Open_IDofHref));
</script>
</body>
</html>

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<!DOCTYPE html>
<html lang="en">
<head>
<meta charset="UTF-8">
<meta http-equiv="X-UA-Compatible" content="IE=edge">
<meta name="viewport" content="width=device-width, initial-scale=1.0">
<link href="vendor/fontawesome-free/css/all.min.css" rel="stylesheet" type="text/css">
<link href="../../../../../css/sb-admin-2.min.css" rel="stylesheet">
<link href="../../../../../css/sb-custom-1.css" rel="stylesheet">
<script type="text/javascript" src="../../../../../js/sb-custom-1.js"></script>
<title>TroubleShooting: DPC_TDRL_HSA_T2_EES</title>
</head>
<body>
<div class="div-Title01">TroubleShooting: DPC_TDRL_HSA_T2_EES</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01">Information</div>
<div class="div-content01">
DPC_TDRL_HSA_T2_EES - T.DRILL
<ul>
<li><a class="href-collapse" href="#lotreserverequest">작업예약</a> - LotReserveRequest</li>
<li><a class="href-collapse" href="#lottrackinrequest">작업시작</a> - LotTrackInRequest</li>
<li><a class="href-collapse" href="#lottrackoutrequest">작업완료</a> - LotTrackOutRequest</li>
<li><a class="href-collapse" href="#issue01">ISSUE #1</a> - S9F7 illegal Data (S5F3)</li>
</ul>
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lotreserverequest">작업예약</a></div>
<div class="div-padding01" id="lotreserverequest">
<ul>
<li>
작업예약 - LotReserveRequest
<ol>
<li class="check-start">[EQP] S6F11 CEID: 601 Lot Request</li>
<li>[MES] EqpLossCheckRequest</li>
<li>[MES] EqpLossCheckRequestReply</li>
<li>[MES] LotEqpChangeCheckRequest</li>
<li>[MES] LotEqpChangeCheckRequestReply</li>
<li>[MES] AdditionItemCheckRequest</li>
<li>[MES] AdditionItemCheckRequestReply</li>
<li>[MES] LotReserveRequest</li>
<li class="check-start">[MES] LotReserveRequestReply</li>
<li>[MES] SpecInfoRequest</li>
<li>[MES] SpecInfoRequestReply</li>
<li>[EQP] S2F41 RCMD: LOT_INFO</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 330 Lot Reserve Complete</li>
<li class="check-start">[EQP] S6F11 CEID: 310 Lot Start Request</li>
<li>[EQP] S2F41 RCMD: LOT_START</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 603 Lot Started</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-01.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackinrequest">작업시작</a></div>
<div class="div-padding01" id="lottrackinrequest">
<ul>
<li>
작업시작 - LotTrackInRequest
<ol>
<li class="check-start">[EQP] CEID: 301 Lot Loading</li>
<li>[MES] LotTrackInRequest</li>
<li>[FDC] LotProcessStartReport</li>
<li>[MES] LotTrackInRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-02.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackoutrequest">작업완료</a></div>
<div class="div-padding01" id="lottrackoutrequest">
<ul>
<li>
작업완료 - LotTrackOutRequest
<ol>
<li class="check-start">[EQP] S6F11 - CEID: 302 Lot Complete</li>
<li>[MES] LotTrackOutRequest</li>
<li>[FDC] LotProcessEndReport</li>
<li>[MES] LotTrackOutRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotProcessEndReport</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-03.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="issue01">ISSUE #1</a> - S9F7 illegal Data (S5F3)</div>
<div class="div-padding01" id="issue01">
모든 설비에서 발생<br />
S5F3 Enable/Disable Alarm - S9F7 발생<br />
<img src="Image/TS_B1_DpcTdrlHsa-ISSUE01-2.png" onclick="OnloadImg(this.src)" />
<br />
<img src="Image/TS_B1_DpcTdrlHsa-ISSUE01-1.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<script>
const items = document.querySelectorAll('.div-header01');
items.forEach(item => item.addEventListener('click', ToggleNextElement_Div));
const items0 = document.querySelectorAll('.href-collapse');
items0.forEach(item => Close_IDofHref(item));
items0.forEach(item => item.addEventListener('click', Open_IDofHref));
</script>
</body>
</html>

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<!DOCTYPE html>
<html lang="en">
<head>
<meta charset="UTF-8">
<meta http-equiv="X-UA-Compatible" content="IE=edge">
<meta name="viewport" content="width=device-width, initial-scale=1.0">
<link href="vendor/fontawesome-free/css/all.min.css" rel="stylesheet" type="text/css">
<link href="../../../../../css/sb-admin-2.min.css" rel="stylesheet">
<link href="../../../../../css/sb-custom-1.css" rel="stylesheet">
<script type="text/javascript" src="../../../../../js/sb-custom-1.js"></script>
<title>TroubleShooting: IMG_DES_WLS_T1_EES</title>
</head>
<body>
<div class="div-Title01">TroubleShooting: IMG_DES_WLS_T1_EES</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01">Information</div>
<div class="div-content01">
IMG_DES_WLS_T1_EES - DES
<ul>
<li><a class="href-collapse" href="#lotreserverequest">작업예약</a> - LotReserveRequest</li>
<li><a class="href-collapse" href="#lottrackinrequest">작업시작</a> - LotTrackInRequest</li>
<li><a class="href-collapse" href="#lottrackoutrequest">작업완료</a> - LotTrackOutRequest</li>
<li><a class="href-collapse" href="#issue01">ISSUE #1</a> - S5F3 Timeout 발생</li>
<li><a class="href-collapse" href="#issue02">ISSUE #2</a> - S2F42(InvalidItemLength)</li>
</ul>
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lotreserverequest">작업예약</a></div>
<div class="div-padding01" id="lotreserverequest">
<!--<ul>
<li>
작업예약 - LotReserveRequest
<ol>
<li class="check-start">[EQP] S6F11 CEID: 601 Lot Request</li>
<li>[MES] EqpLossCheckRequest</li>
<li>[MES] EqpLossCheckRequestReply</li>
<li>[MES] LotEqpChangeCheckRequest</li>
<li>[MES] LotEqpChangeCheckRequestReply</li>
<li>[MES] AdditionItemCheckRequest</li>
<li>[MES] AdditionItemCheckRequestReply</li>
<li>[MES] LotReserveRequest</li>
<li class="check-start">[MES] LotReserveRequestReply</li>
<li>[MES] SpecInfoRequest</li>
<li>[MES] SpecInfoRequestReply</li>
<li>[EQP] S2F41 RCMD: LOT_INFO</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 330 Lot Reserve Complete</li>
<li class="check-start">[EQP] S6F11 CEID: 310 Lot Start Request</li>
<li>[EQP] S2F41 RCMD: LOT_START</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 603 Lot Started</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-01.png" onclick="OnloadImg(this.src)" />-->
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackinrequest">작업시작</a></div>
<div class="div-padding01" id="lottrackinrequest">
<!--<ul>
<li>
작업시작 - LotTrackInRequest
<ol>
<li class="check-start">[EQP] CEID: 301 Lot Loading</li>
<li>[MES] LotTrackInRequest</li>
<li>[FDC] LotProcessStartReport</li>
<li>[MES] LotTrackInRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-02.png" onclick="OnloadImg(this.src)" />-->
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackoutrequest">작업완료</a></div>
<div class="div-padding01" id="lottrackoutrequest">
<!--<ul>
<li>
작업완료 - LotTrackOutRequest
<ol>
<li class="check-start">[EQP] S6F11 - CEID: 302 Lot Complete</li>
<li>[MES] LotTrackOutRequest</li>
<li>[FDC] LotProcessEndReport</li>
<li>[MES] LotTrackOutRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotProcessEndReport</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-03.png" onclick="OnloadImg(this.src)" />-->
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="issue01">ISSUE #1</a> - S5F3 Timeout 발생</div>
<div class="div-padding01" id="issue01">
<img src="Image/TS_B1_ImgDesWls-ISSUE1-01.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="issue02">ISSUE #2</a> - S2F42(InvalidItemLength) </div>
<div class="div-padding01" id="issue02">
S2F42 메시지가 오류로 처리됩니다.<br />
SML의 2'nd Item이 Fixed Length = 1 로 정의되어 있음(SML 수정 필요)<br />
<img src="Image/TS_B1_ImgDesWls-ISSUE2-01.png" onclick="OnloadImg(this.src)" />
<img src="Image/TS_B1_ImgDesWls-ISSUE2-02.png" onclick="OnloadImg(this.src)" />
</div>
</div>
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130
DDUtilityHelp/eis_doc/doc_TroubleShooting/01/B1EqpScenarios/03/TS_B1_ImgDiexpAkc.html Normal file
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<!DOCTYPE html>
<html lang="en">
<head>
<meta charset="UTF-8">
<meta http-equiv="X-UA-Compatible" content="IE=edge">
<meta name="viewport" content="width=device-width, initial-scale=1.0">
<link href="vendor/fontawesome-free/css/all.min.css" rel="stylesheet" type="text/css">
<link href="../../../../../css/sb-admin-2.min.css" rel="stylesheet">
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<script type="text/javascript" src="../../../../../js/sb-custom-1.js"></script>
<title>TroubleShooting: IMG_DIEXP_AKC_T2_EES</title>
</head>
<body>
<div class="div-Title01">TroubleShooting: IMG_DIEXP_AKC_T2_EES</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01">Information</div>
<div class="div-content01">
IMG_DIEXP_AKC_T2_EES - DI 노광<br />
AUTO CAM 파일 사용
<ol>
<li>1, 2, 3, 5, 12호기: \\192.168.233.84\AutoCam</li>
<li>7, 8, 10호기: \\192.168.113.121\AutoCam</li>
</ol>
<ul>
<li><a class="href-collapse" href="#lotreserverequest">작업예약</a> - LotReserveRequest</li>
<li><a class="href-collapse" href="#lottrackinrequest">작업시작</a> - LotTrackInRequest</li>
<li><a class="href-collapse" href="#lottrackoutrequest">작업완료</a> - LotTrackOutRequest</li>
<li><a class="href-collapse" href="#issue01">ISSUE #1</a> - S9F7 illegal Data (S5F3)</li>
</ul>
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lotreserverequest">작업예약</a></div>
<div class="div-padding01" id="lotreserverequest">
<ul>
<li>
작업예약 - LotReserveRequest
<ol>
<li class="check-start">[EQP] S6F11 CEID: 601 Lot Request</li>
<li>[MES] EqpLossCheckRequest</li>
<li>[MES] EqpLossCheckRequestReply</li>
<li>[MES] LotEqpChangeCheckRequest</li>
<li>[MES] LotEqpChangeCheckRequestReply</li>
<li>[MES] AdditionItemCheckRequest</li>
<li>[MES] AdditionItemCheckRequestReply</li>
<li>[MES] LotReserveRequest</li>
<li class="check-start">[MES] LotReserveRequestReply</li>
<li>[MES] SpecInfoRequest</li>
<li>[MES] SpecInfoRequestReply</li>
<li>[EQP] S2F41 RCMD: LOT_INFO</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 330 Lot Reserve Complete</li>
<li class="check-start">[EQP] S6F11 CEID: 310 Lot Start Request</li>
<li>[EQP] S2F41 RCMD: LOT_START</li>
<li>[EQP] S2F42 '0' or '4'</li>
<li>[EQP] S6F11 CEID: 603 Lot Started</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-01.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackinrequest">작업시작</a></div>
<div class="div-padding01" id="lottrackinrequest">
<ul>
<li>
작업시작 - LotTrackInRequest
<ol>
<li class="check-start">[EQP] CEID: 301 Lot Loading</li>
<li>[MES] LotTrackInRequest</li>
<li>[FDC] LotProcessStartReport</li>
<li>[MES] LotTrackInRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-02.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="lottrackoutrequest">작업완료</a></div>
<div class="div-padding01" id="lottrackoutrequest">
<ul>
<li>
작업완료 - LotTrackOutRequest
<ol>
<li class="check-start">[EQP] S6F11 - CEID: 302 Lot Complete</li>
<li>[MES] LotTrackOutRequest</li>
<li>[FDC] LotProcessEndReport</li>
<li>[MES] LotTrackOutRequestReply</li>
<li>[MES] LotTrackInOutAfterRequest</li>
<li>[MES] LotProcessEndReport</li>
<li>[MES] LotTrackInOutAfterRequestReply</li>
</ol>
</li>
</ul>
<img src="Image/TS_B1_DpcTdrlHsa-03.png" onclick="OnloadImg(this.src)" />
</div>
</div>
<div class="div-margin01 div-border01">
<div class="div-header01 div-border01"><a name="issue01">ISSUE #1</a> - S9F7 illegal Data (S5F3)</div>
<div class="div-padding01" id="issue01">
모든 설비에서 발생<br />
S5F3 Enable/Disable Alarm - S9F7 발생<br />
<img src="Image/TS_B1_DpcTdrlHsa-ISSUE01-2.png" onclick="OnloadImg(this.src)" />
<br />
<img src="Image/TS_B1_DpcTdrlHsa-ISSUE01-1.png" onclick="OnloadImg(this.src)" />
</div>
</div>
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